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Parametric study of the electrical to thermal power conversion in an inductively coupledrf plasma torch

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Abstract

An inductively coupled (ic) radio-frequency (rf) stabilized argon plasma was generated in a quartz tube using a 7 MHzrf generator. The electrical and thermal powers were measured and the efficiency of energy conversion was computed. The results indicate that for a constant power input, there is an optimum argon flow rate for which maximum energy conversion efficiency occurs.

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Pai, J.R., Venkataramani, N. & Rohatgi, V.K. Parametric study of the electrical to thermal power conversion in an inductively coupledrf plasma torch. Sadhana 14, 121–131 (1989). https://doi.org/10.1007/BF02812003

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  • DOI: https://doi.org/10.1007/BF02812003

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