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Science Issues Related to Wafer Cleaning in Silicon Technology
This paper highlights a number of basic science issues related to wafer cleaning in silicon technology. Particle removal techniques, metal...
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The Properties of Plastics
This chapter provides specific information on the range of properties in the many different plastics available to meet different design requirements... -
Proximal Probes: Techniques for Measuring at the Nanometer Scale
Innovation in analytical surface science has evolved a panoply of tools which are sensitive to nanometer scale lengths in one dimension (typically... -
Multifunctional Macromolecules – Some Device Options
Multifunctional macromolecules can, in principal, combine a number of active material functions such as optical nonlinearity and photoconductivity in...
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Lubrication Mechanisms and Lubricants
Sliding between clean solid surfaces is generally characterized by a high coefficient of friction and severe wear due to the specific properties of... -
Research opportunities on clusters and cluster-assembled materials—A Department of Energy, Council on Materials Science Panel Report
The Panel was charged with assessing the present scientific understanding of the size-dependent physical and chemical properties of clusters, the...
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Gas atomization of cobalt ferrite-phosphate melts
A rapidly solidified (Co, Fe) 3 O 4 spinel was formed in a cobalt-iron-phosphate glass matrix by gas atomization of melts of composition 37.5% mol %...
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Dry Etching Processes
The increase in complexity and the decrease in cost of solid state devices and integrated circuits over the past twenty-five years has been... -
Control of Bonded SiH in Silicon Oxides Deposited by Remote Plasma Enhanced CVD
This paper describes Optical Emission Spectrocopy (OES) and Mass Spectrometry (MS) studies of the plasma region in the Remote Plasma Enhanced...
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Synthesis of Ceramic Powders and Thin Films from Laser Heated Gases
Two laser initiated gas phase synthesis processes have been developed and the characteristics of resulting materials related to process variables;... -
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Hydrides
Hydrogen may perhaps be described as the ‘will o’ the wisp’ amongst the interstitial atoms and, at the same time, the most genuinely interstitial...