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Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation
This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope...
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Nanotechnology: Contribution to Inclusive Growth in Russia
Creating progressive technological solutions for the development of industry is one of the key areas of social and economic policy of the state. It... -
Proceedings of the 38th International MATADOR Conference
This book presents 58 refereed papers given at the 38th Matador Conference held at National Formosa University, Taiwan in March 2015. The MATADOR...
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Atomic and Close-to-Atomic Scale Manufacturing: The Fundamental Technology of Manufacturing III
Atomic and close-to-atomic scale manufacturing (ACSM) aims to realize cost-effective, deterministic, and scalable manufacturing of next-generation... -
EUV Measurement Technologies
The main property of the EUV wavelength region is its strong absorption in all materials. It does not propagate through air gaps larger than a... -
Metrology and Inspection Equipment
This chapter covers a key part of modern semiconductor chip manufacturing equipment, metrology, and inspection. It is divided into several sections,... -
Other Nanomanufacturing Principles and Technological Breakthroughs
Focusing on the core research goals of nanoprecision manufacturing, nanoscale manufacturing, and cross-scale manufacturing in nanomanufacturing, this... -
Recent Advances in Mechanical Engineering Select Proceedings of RAME 2020
This book presents the select proceedings of the second International Conference on Recent Advances in Mechanical Engineering (RAME 2020). The topics... -
Methods for latent image simulations in photolithography with a polychromatic light attenuation equation for fabricating VIAs in 2.5D and 3D advanced packaging architectures
As demand accelerates for multifunctional devices with a small footprint and minimal power consumption, 2.5D and 3D advanced packaging architectures...
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Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures
Nanotechnology is widely used in many fields such as information, optoelectronics, materials, environment, energy, biology, medicine and national... -
The Development of the Semiconductor Supply Chain in India: Challenges and Opportunities
The semiconductor industry plays a pivotal role in driving technological advancements across various sectors, from consumer electronics to critical... -
Outlook
Through continuing efforts committed in principle innovation and cutting-edge technology tackling, this Major Research Plan has promoted China’s... -
Post-processing for Additive Manufactured Metal Parts: A Brief Introduction
Post-processing of AM built parts is a necessary but non-value-added activity associated with ensuring the part can deliver on its promised... -
Freeform surface profiling by iterative learning-extremum seeking control
This paper presents a metrology tool path planning algorithm using an iterative learning-extremum seeking control (ILESC) scheme that combines...
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Design an Electric Vehicle with Advanced Power Transmission
The field of wireless power transfer has expanded significantly with recent improvements in power electronics, Speed and capacity simulations of...