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Showing 1-20 of 955 results
  1. Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (II)

    Yuki Shimizu, Yasuhiro Mizutani, Masaki Michihata in Nanomanufacturing and Metrology
    Article 09 April 2021
  2. Foreword to the Special Issue on Micro- and Nano-Metrology in Japan (I)

    Yuki Shimizu, Yasuhiro Mizutani, Masaki Michihata in Nanomanufacturing and Metrology
    Article 27 February 2021
  3. Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation

    This article presents the application and evaluation of a cantilever with integrated sensing and actuation as part of an atomic force microscope...

    Janik Schaude, Tino Hausotte in Nanomanufacturing and Metrology
    Article Open access 11 June 2022
  4. Nanotechnology: Contribution to Inclusive Growth in Russia

    Creating progressive technological solutions for the development of industry is one of the key areas of social and economic policy of the state. It...
    Irina V. Zaporotskova, Natalya P. Boroznina, Sergey V. Boroznin in New Technology for Inclusive and Sustainable Growth
    Chapter 2022
  5. Proceedings of the 38th International MATADOR Conference

    This book presents 58 refereed papers given at the 38th Matador Conference held at National Formosa University, Taiwan in March 2015. The MATADOR...

    Srichand Hinduja, Paulo Jorge da Silva Bartolo, ... Wen-Yuh Jywe
    Conference proceedings 2022
  6. Atomic and Close-to-Atomic Scale Manufacturing: The Fundamental Technology of Manufacturing III

    Atomic and close-to-atomic scale manufacturing (ACSM) aims to realize cost-effective, deterministic, and scalable manufacturing of next-generation...
    Fengzhou Fang, **chun Luo, ... Kornel Ehmann in CIRP Novel Topics in Production Engineering: Volume 1
    Chapter 2024
  7. EUV Measurement Technologies

    The main property of the EUV wavelength region is its strong absorption in all materials. It does not propagate through air gaps larger than a...
    Serhiy Danylyuk, Klaus Bergmann in Tailored Light 2
    Chapter 2024
  8. Metrology and Inspection Equipment

    This chapter covers a key part of modern semiconductor chip manufacturing equipment, metrology, and inspection. It is divided into several sections,...
    Reference work entry 2024
  9. Other Nanomanufacturing Principles and Technological Breakthroughs

    Focusing on the core research goals of nanoprecision manufacturing, nanoscale manufacturing, and cross-scale manufacturing in nanomanufacturing, this...
    Bingheng Lu, Jianbin Luo, ... Ming Liu in Fundamental Research on Nanomanufacturing
    Chapter 2023
  10. Recent Advances in Mechanical Engineering Select Proceedings of RAME 2020

    This book presents the select proceedings of the second International Conference on Recent Advances in Mechanical Engineering (RAME 2020). The topics...
    Anil Kumar, Amit Pal, ... Prashant Kumar Jain in Lecture Notes in Mechanical Engineering
    Conference proceedings 2021
  11. Methods for latent image simulations in photolithography with a polychromatic light attenuation equation for fabricating VIAs in 2.5D and 3D advanced packaging architectures

    As demand accelerates for multifunctional devices with a small footprint and minimal power consumption, 2.5D and 3D advanced packaging architectures...

    Daniel C. Smallwood, Paul McCloskey, ... James F. Rohan in Microsystems & Nanoengineering
    Article Open access 25 May 2021
  12. Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures

    Nanotechnology is widely used in many fields such as information, optoelectronics, materials, environment, energy, biology, medicine and national...
    Bingheng Lu, Jianbin Luo, ... Ming Liu in Fundamental Research on Nanomanufacturing
    Chapter 2023
  13. The Development of the Semiconductor Supply Chain in India: Challenges and Opportunities

    The semiconductor industry plays a pivotal role in driving technological advancements across various sectors, from consumer electronics to critical...
    Manik Sadashiv Sonawane, Sanjay Shamrao Pawar, ... Vikas Dattatray Patil in ICT: Smart Systems and Technologies
    Conference paper 2024
  14. Outlook

    Through continuing efforts committed in principle innovation and cutting-edge technology tackling, this Major Research Plan has promoted China’s...
    Bingheng Lu, Jianbin Luo, ... Ming Liu in Fundamental Research on Nanomanufacturing
    Chapter 2023
  15. Post-processing for Additive Manufactured Metal Parts: A Brief Introduction

    Post-processing of AM built parts is a necessary but non-value-added activity associated with ensuring the part can deliver on its promised...
    Jonathan Smith, David Butler in Springer Handbook of Additive Manufacturing
    Chapter 2023
  16. Freeform surface profiling by iterative learning-extremum seeking control

    This paper presents a metrology tool path planning algorithm using an iterative learning-extremum seeking control (ILESC) scheme that combines...

    Article 06 May 2024
  17. Design an Electric Vehicle with Advanced Power Transmission

    The field of wireless power transfer has expanded significantly with recent improvements in power electronics, Speed and capacity simulations of...
    Nitin Kumar Waghmare, Akhil Raj, ... Harsh Gupta in Recent Advances in Intelligent Manufacturing
    Conference paper 2023
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