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Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis
Carbon nanotubes (CNTs) can be locally grown on custom-designed CMOS microheaters by a thermal chemical vapour deposition (CVD) process to utilize...
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Patterned synthesis of nanowires in microheaters: design and operational aspects
For the first time, a review of microheater design and its implementation for nanowire synthesis has been investigated. The recent developments on...
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Investigation of CMOS compatible titanium nitride-based microheater for microthrusters
This paper presents a detailed investigation of titanium nitride (TiN)-based microheaters for space applications. TiN-based microheaters with...
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Microheater: material, design, fabrication, temperature control, and applications—a role in COVID-19
Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or...
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A highly smart MEMS acetone gas sensors in array for diet-monitoring applications
In the present work, gas sensor arrays consisted of four different sensing materials based on CuO and their depositions on the MEMS microheaters were...
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Research and Development of Flexible Mixed Potential NO2 Sensors with Low Power Consumption
Chapters 3 and 4 focus chiefly on the improvement of the catalytic activity of sensitive materials and the microstructures of the three-phase...
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Ultra-compact nonvolatile phase shifter based on electrically reprogrammable transparent phase change materials
Optical phase shifters constitute the fundamental building blocks that enable programmable photonic integrated circuits (PICs)—the cornerstone of...
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An analytical method to design annular microfilaments with uniform temperature
Due to their complex electro-thermal characteristics microhotplates used in environmental gas sensors require careful design to exhibit uniform...
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Droplet microreactor for high-throughput fluorescence-based measurements of single catalyst particle acidity
The particles of heterogeneous catalysts differ greatly in size, morphology, and most importantly, in activity. Studying these catalyst particles in...
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Ultrathin silk nanofiber–carbon nanotube skin tattoos for wirelessly triggered and temperature feedbacked transdermal drug delivery
Transdermal drug delivery has emerged as an alternative to conventional drug delivery systems as it enables painless and convenient drug...
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On-Chip Micro Temperature Controllers Based on Freestanding Thermoelectric Nano Films for Low-Power Electronics
Multidimensional integration and multifunctional component assembly have been greatly explored in recent years to extend Moore’s Law of modern...
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Tunable narrow-band single-channel add-drop integrated optical filter with ultrawide FSR
Free-spectral-range (FSR)-free optical filters have always been a critical challenge for photonic integrated circuits. A high-performance FSR-free...
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Transparent electrowetting-on-dielectric device with permanent liquid electrodes
Transparent electrowetting is a branch of Electrowetting on Dielectric (EWOD) devices that use transparent electrodes. These devices are often...
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Micro-polymerase chain reaction for point-of-care detection and beyond: a review microfluidics and nanofluidics
Miniaturization of biological and chemical analytical devices with microelectromechanical systems (MEMS) technology is important for medical...
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Label-free multimodal electro-thermo-mechanical (ETM) phenoty** as a novel biomarker to differentiate between normal, benign, and cancerous breast biopsy tissues
BackgroundTechnologies for quick and label-free diagnosis of malignancies from breast tissues have the potential to be a significant adjunct to...
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Co-designing Photonic Accelerators for Machine Learning on the Edge
Domain-specific neural network accelerators have seen growing interest in recent years due to their improved energy-efficiency and inference...
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PID Temperature Control System-Based Microfluidic PCR Chip for Genetic Analysis
A microfluidic device based on the polymerase chain reaction (PCR) technique for genetic diagnostics was designed and fabricated. The continuous-flow...
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Induction heating of dual magnetic particles embedded PDMS molds for roller embossing applications
Roller embossing is an effective manufacturing process for replicating microstructures onto polymeric substrates, featuring high-volume production,...
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Design and analysis of dual working area micro-hotplate based on thermal crosstalk
Micro-hotplates have provided the possibilities of miniaturization, low power consumption, and high integration for widespread application in MEMS...
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Enabling direct microcalorimetric measurement of metabolic activity and exothermic reactions onto microfluidic platforms via heat flux sensor integration
All biological processes use or produce heat. Traditional microcalorimeters have been utilized to study the metabolic heat output of living organisms...
