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  1. Electrically-Activated, Micromachined Diaphragm Valves

    Electrically-activated diaphragm valves have been fabricated using heated bimetallic structures to provide the operating force. These valves can be...
    J. H. Jerman in Micro System Technologies 90
    Conference paper 1990

  2. Technology Assessment

    The JTECH* Report highlights the progress of the Japanese manufacturing community. The report is interesting because it not only offers a view of the...
    V. Daniel Hunt in Mechatronics:Japan’s Newest Threat
    Chapter 1988
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