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Investigation on Formaldehyde SAW Sensor with ZnO Film Prepared through Radio Frequency Magnetron Sputtering
AbstractThe ZnO films were deposited on the surface acoustic wave (SAW) chip by radio frequency magnetron sputtering. Sputtering power of 50, 100,...
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Study of Plasma Particle Distribution and Electron Temperature in Cylindrical Magnetron Sputtering
The plasma density and electron temperature are governed and influenced by the high-power pulsed magnetron sputtering parameters (e.g., operating...
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Properties of Coatings Based on Cerium Dioxide Obtained by Magnetron Sputtering
Abstract —The review presents the parameters of magnetron sputtering of coatings based on cerium dioxide and their relationship to the structure and...
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Nano-Sized Copper Films Prepared by Magnetron Sputtering
AbstractCopper films with a thickness varying from 6 nm to 100 nm are prepared by magnetron sputtering. The films are characterized by homogeneous...
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Phase Composition and Surface Morphology of Thin AlN Films Obtained trough Magnetron Sputtering
AbstractAluminum nitride films have been obtained through magnetron sputtering of an aluminum target in an argon and nitrogen atmosphere on silicon...
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Fabrication of metal-supported solid oxide fuel cells by combining aerosol deposition and magnetron sputtering techniques
In the present study, the fabrication route, including combining the aerosol deposition method and magnetron sputtering, was demonstrated for the...
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Preparation of Water-Repellent Film on a Plastic Plate by Unbalanced Radio-Frequency Magnetron Plasma Sputtering Using PTFE Target for a Next-Generation Automobile Window
A plastic plate made of polycarbonate (PC) was functionalized as a water-repellent nature by unbalanced radio-frequency(rf) magnetron plasma...
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Composite Track Membrane Produced by Roll Technology of Magnetron Sputtering of Titanium Nanolayer
AbstractThe possibility of obtaining a composite track membrane (TM) is investigated. The TM surface was modified by the method of planar magnetron...
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A Comprehensive Evaluation of Microwave Reheating Performance Using Dynamic Complementary-Frequency Shifting Strategy in a Solid-State System
Solid-state techniques have the potential to address the nonuniform heating in magnetron-based microwave ovens. A previously developed dynamic...
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Dielectric Properties of Au/SrTiO3/p-Si Structure Obtained by RF Magnetron Sputtering in a Wide Frequency Range
Dielectric properties of Au/p–Si structure with Strontium titanate (SrTiO 3 ) interlayer were examined in the frequency range of 100–900 kHz (by step...
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Improved electrochemical performance of surface-modified lithium-rich layered oxide electrodes with indium tin oxide (ITO) coating by magnetron sputtering
In this study, indium tin oxide (ITO) has been used for the first time in the surface modification of lithium-rich manganese-based cathode materials...
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Rapid and scalable preparation of flexible Ag nanoparticle-decorated nanocellulose SERS sensors by magnetron sputtering for trace detection of toxic materials
Cellulose-based surface-enhanced Raman scattering (SERS) platforms have attracted extensive attention as a flexible, sustainable, eco-friendly and...
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Experimental and Theoretical Studies on Ag Nanoparticles with Enhanced Plasmonic Response, Formed Within Al2O3 Thin Films Deposited by Magnetron Sputtering
Reactive magnetron sputtering was employed to prepare nanocomposite thin films of Ag/Al 2 O 3 , on a glass substrate. The films are characterized by the...
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Thickness Effect on Electro-Optical Characteristics of RF Magnetron Sputtered MoS2/p-Si heterojunction Devices Fabricated by Aerosol Jet Printing
The main aim of this article has to investigate some electro-optical properties of MoS 2 /p-Si heterojunctions fabricated by an innovative technique,...
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An investigation of the work function and stability of chromium oxide thin films deposited by reactive magnetron sputtering
The deposition parameters used during the sputtering process are instrumental in determining the properties of the deposited films and can be...
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Elaboration and Characterization of Amorphous Silicon Carbide Thin Films (a-SiC) by Sputerring Magnetron Technique for Photoelectrochemical CO2 Conversion
Semiconductors as photoelectric catalysis is recognized as a promising strategy for simultaneous face energy crisis and environmental pollution. In...
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Properties of Carbon Fibers after Applying Metal Coatings on them by Magnetron Sputtering Technology
Using magnetron sputtering technology, two types of metal coatings, stainless steel and titanium, are applied to the surface of unidirectional carbon...
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The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target
Anomalous erosion can happen, in the erosion sections of a rectangular target, resulting in, lower usage of the target. To determine the cause of...
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Three-dimensional observations of the electric field distribution of variable frequency microwaves, and scaling-up organic syntheses
Variable Frequency Microwave (VFM) radiation provides a solution to the inhomogeneity of the electric field in the cavity, which has long led to a...
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Investigation of Processes on the Surface and in the Bulk of Magnetron Materials under Thermal and Thermoacoustic Treatment during Vacuum Pum** of the Air Atmosphere
AbstractA method for measuring the relative amount of gas released from the magnetron during its vacuum pum** is presented. Equations describing...
