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  1. Article

    Open Access

    Copper-graphene heterostructure for back-end-of-line compatible high-performance interconnects

    Here, we demonstrate the fabrication of a Cu-graphene heterostructure interconnect by the direct synthesis of graphene on a Cu interconnect with an enhanced performance. Multilayer graphene films were synthesi...

    Myungwoo Son, Jaewon Jang, Yongsu Lee, Jungtae Nam in npj 2D Materials and Applications (2021)