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    Article

    Molecular Dynamic Simulation on the Effect of Polymer Molecular Size in Thermal Nanoimprint Lithographic (T-NIL) Process

    Molecular dynamic simulation of thermal nanoimprint lithographic (T-NIL) process has been performed to study the effect of the polymer molecular size on polymer flow for various mold cavity geometries. First, ...

    Seokpum Kim, Dong Eon Lee, Woo Il Lee in Tribology Letters (2013)

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    Article

    Molecular Dynamic Studies on Deformation of Polymer Resist During Thermal Nano Imprint Lithographic Process

    Molecular dynamic simulation of nano imprint lithography (NIL) in which nanoscale patterned stamp is pressed onto amorphous polyethylene (PE) surface is performed to study the deformation behavior of polymer r...

    Young Seok Woo, Dong Eon Lee, Woo Il Lee in Tribology Letters (2009)