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within Engineering Remove this filter Biological and Medical Physics, Biophysics Remove this filter Surfaces and Interfaces, Thin Films Remove this filter T. Eguchi Remove this filter

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    Functional Probes for Scanning Probe Microscopy

    Functional probes for scanning probe microscopy (SPM) were fabricated with focused ion beam (FIB) method. Metal-tip cantilevers were fabricated for Kelvin probe force microscopy (KFM) and glass-coated tungsten...

    K. Akiyama, T. Eguchi, M. Hamada, T. An, Y. Fujikawa… in Frontiers in Materials Research (2008)