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    Optical Study of SiO2/nanocrystalline-Si Multilayers Using Ellipsometry

    Using variable-angle spectroscopic ellipsometry, we measure the pseudo-dielectric functions of as-deposited and annealed SiO2/SiOx multilayers (MLs). The SiO2(2nm)/SiOx(2nm) MLs have been prepared under various d...

    Kang-Joo Lee, Tae-Dong Kang, Hosun Lee, Seung Hui Hong… in MRS Online Proceedings Library (2004)