Skip to main content

1 Result(s)

within Rajesh Rao Remove this filter Applied and Technical Physics Remove this filter

and

  1. No Access

    Article

    Monitoring of Silicon Nano-Crystal Dots Formation on SiO2 and on Si3N4 in an UHV-CVD System

    Applicability of SPA (Surface Photo Absorption) as an in-situ monitor of Si nanocrystal formation was comparatively studied to a monitoring with pyrometer.

    Takayuki Kawashima, Supika Mashiro, Junro Sakai… in MRS Online Proceedings Library (2011)