Skip to main content

2 Result(s)

within R. E. Mackay Remove this filter Engineering Remove this filter

and

  1. No Access

    Article

    3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS

    This paper examines wet and dry fabrication of vertical micro-mirrors in (110) silicon for use in an innovative BioMEMS integrating grip** and micro force sensing functionalities. Wet anisotropic chemical et...

    R. E. Mackay, N. Lionis, H. R. Le in Microsystem Technologies (2011)

  2. No Access

    Chapter and Conference Paper

    Micro-grip** of Small Scale Tissues

    This paper describes the design and simulation of an integrated micro-electro-mechanical system (MEMS) to be used for small scale tissue manipulation. The microgrippers are to be used to test the mechanical ce...

    R. E. Mackay, H. R. Le, K. Donnelly… in 4th European Conference of the Internation… (2009)