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    Effect of thickness on infrared optical property of VO2 film deposited by magnetron sputtering

    A series of VO2 films with different thicknesses (from about 25 nm to 250 nm) were prepared on sapphire substrates by radio frequency magnetron sputtering. The deposition times varied from 15 min to 150 min. The ...

    ZhenHuai Yang, QiuLing Yang, Lei Yang, Bing Dai in Science China Technological Sciences (2020)