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Article
Optimal design of multi-nozzle etching process for shadow mask
This paper presents a new design approach of a multi-nozzle etching process which is the core system for the production of a shadow mask. The shadow mask, which is a thin metal plate with a huge number of smal...
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Article
Silicon ingot diameter modeling in Czochralski process and its dynamic simulation
Silicon wafers are manufactured by cutting an ingot into the same thickness. The Czochralski process is a representative method for making an ingot. During manufacture, the ingot diameter is affected by the pu...