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Article
Effects of the variation in α-phase volume fraction on the thermal stability of TiAl alloys with a lamellar microstructure
The thermal stability of two-phase (α + γ) lamellar microstructure in Ti-Al-Mo PST (polysynthetically twinned that has single colony) crystals, containing C or Si, was investigated. In addition, the variation ...
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Article
Effects of the Variation in α-Phase Volume Fraction on the Thermal Stability of TiAl Alloys with Lamellar Microstructures
The thermal stability of lamellar microstructure in Ti-Al-Mo PST crystals containing C or Si, was investigated. In addition, the variation of α-phase volume fraction in Ti-Al-Mo-(C,Si) systems was investigated...
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Article
Silicon-to-indium tin oxide coated glass bonding for packaging of field emission arrays fabricated on silicon wafer
A silicon-to-In2O3:Sn coated glass bonding has been developed for the package of field emission arrays fabricated on the silicon wafer, utilizing a conventional silicon-to- silicon anodic bonding using the glass ...
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Article
A Low Temperature Direct Bonding Method Using an Electron-Beam Evaporated Silicon-Oxide Interlayer
In this work, we proposed a direct bonding method using interlayers for single crystalline silicon wafers and glass wafers. Various materials were used for interlayers of thermal oxide, sputtered nitride, elec...
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Article
Experimental Analysis of the Process of Anodic Bonding using an Evaporated Glass Layer
A silicon-to-silicon anodic bonding process using a glass layer deposited by electron beam evaporation will be described. Corning #7740 Pyrex glass was used the source material of electron evaporation. From Au...
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Article
A Study on Hermetic Glass Sealing Using a Modified Direct Bonding Method
This paper presents the process and experimental results about the improved initial bonding between #7740 glass and silicon wafers. We employed a modified initial bonding procedure, called by water-enhanced di...
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Article
Al-21Ti-23Cr High-Temperature Protective Coating on TiAl Intermetallic Compounds by RF Magnetron Sputtering
Ti-48A1 specimens were coated with Al-21Ti-23Cr film at 200 W, 0.8 Pa and 573 K by RF magnetron sputtering. The oxidation behavior of the coated specimens was investigated through isothermal and cyclic oxidati...
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Article
Fabrication of silicon membrane using fusion bonding and two-step electrochemical etch-stop**
A new type of silicon membrane structure was fabricated using wafer fusion bonding and two-step electrochemical etch-stop** methods. An “active wafer” of p-type epi/n-type epi/p-type substrate was first elct...
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Article
Interfacial oxide growth and filling-up behaviour of the micro-gap in silicon fusion bonding processes
In the silicon fusion bonding (SFB) process, the influence of post-annealing atmospheres on the micro-gap existing at the Si-Si bonding interface was investigated with the observation of ultrasonic images, ang...
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Article
Environmental Effects on the Room Temperature Ductility of Polysynthetically Twinned (PST) Crystals of Binary and some Ternary TiAl Compounds
Environmental effects on the room temperature ductility of polysynthetically twinned (PST) crystals of binary and some ternary TiAl compounds have been investigated through tensile tests conducted in four diff...
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Article
Electrical characteristics and reheat-treatment effects in a ZnO varistor fabricated by two-stage heat-treatment
Conventional ZnO varistors are generally fabricated by sintering ZnO powder mixed with additives such as Bi2O3, Sb2O3, Cr2O3, Co2O3, and MnO2. To reduce abnormal grain growth and change in electrical characterist...
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Article
Cold-Rolling and Subsequent Annealing of Ti-Rich Tial Polysynthetically Twinned (PST) Crystals
Polysynthetically twinned (PST) crystals of Ti-rich TiAl have been grown and specimens cut from these crystals have been rolled at room temperature and subsequently annealed at 900°C and 1000°C. When the shear...
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Article
Cold-rolling of Ti-rich TiAl polysynthetically twinned crystals
Polysynthetically twinned crystals of TiAl with a nearly stoichiometric composition have been grown and rolled at room temperature. The maximum total reduction in thickness which is attainable without fracture...