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    Microstructure and Mechanical Properties of Nanolayered TiN/Cu Thin Films

    Structural and mechanical properties of nanoscale TiN/Cu multilayers grown by dual ion beam sputtering with bilayer periods (A) ranging from 2.5 to 50 nm were studied. Both low-angle and high-angle X-ray diffr...

    Y. Y. Tse, G. Abadias, A. Michel, C. Tromas, M. Jaouen in MRS Online Proceedings Library (2004)