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Article
Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVD
In this work, low frequency PECVD a-SiCxNy:H thin films have been synthesized in the temperature range 25–300 °C from hexamethyldisilazane precursor mixed with ammonia at various concentrations. A relevant correl...
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Article
Novel concept for the preparation of gas selective nanocomposite membranes
In this work we report on a novel concept for the preparation of gas selective composite membranes by a simple and robust synthesis protocol involving a controlled in-situpolycondensation of functional alkoxysila...