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  1. No Access

    Article

    TEM Study of High Quality GaN Grown by OMVPE Using an Intermediate Layer

    We report on high quality GaN layers grown with the use of one intermediate layer. The defect analysis shows that the density of dislocation is only 8×107/cm2 in these layers, compared to over 1010/cm2 for layers...

    M. Benamara, Z. Liliental-Weber, S. Kellermann, W. Swider in MRS Online Proceedings Library (1994)

  2. No Access

    Article

    Atomic Structure of the Interfaces Between Silicon Directly Bonded Wafers

    The so-called Direct Wafer Bonding (DWB) technique opens new possibilities for the electronic industry but still suffers from the poor knowledge we have of the microstructure of these interfaces and hence of t...

    M. Benamara, A. Rocher, A. Laporte, G. Sarrabayrouse in MRS Online Proceedings Library (1995)

  3. No Access

    Article

    Direct Wafer Bonding of Preamorphized Silicon Wafers.

    This paper presents the comparison of the structural and electrical characteristics of Si/Si bonded interfaces depending on whether the surface layers were rendered amorphous by high dose ion implantation prio...

    A. Laporte, G. Sarrabayrouse, M. Benamara, A. Claverie in MRS Online Proceedings Library (1995)

  4. No Access

    Article

    Polarity of GaN

    Convergent beam electron diffraction (CBED) was applied to study polarity of GaN heterolayers grown by MOCVD on sapphire and SiC substrates and also mechano-chemically polished bulk GaN platelet crystals grown...

    Z. Liliental-Weber, M. Benamara, O. Richter, W. Swider in MRS Online Proceedings Library (1998)

  5. Article

    TEM Study of Defects in Laterally Overgrown GaN Layers

    Transmission electron microscopy was applied to study defects in laterally overgrown GaN layers, with initial growth on Al2O3 substrates followed by further growth over SiO2 masks. Dislocations found in the overg...

    Z. Liliental-Weber, M. Benamara, W. Swider in MRS Internet Journal of Nitride Semiconduc… (1999)

  6. Article

    The Role of the Multi Buffer Layer Technique on the Structural Quality of GaN

    Successive growth of thick GaN layers separated by either LT-GaN or LT-AlN interlayers have been investigated by transmission electron microscopy techniques. One of the objectives of this growth method was to ...

    M. Benamara, Z. Liliental-Weber, J. H. Mazur in MRS Internet Journal of Nitride Semiconduc… (2000)

  7. Article

    Mg Segregation, Difficulties of P-Do** in GaN

    Transmission electron microscopy has been used to study defects formed in Mg-doped GaN crystals. Three types of crystals have been studied: bulk crystals grown by a high pressure and high temperature process w...

    Z. Liliental-Weber, M. Benamara, W. Swider in MRS Internet Journal of Nitride Semiconduc… (2000)

  8. Article

    Effect of the Do** and the Al Content on the Microstructure and Morphology of Thin AlxGa1−xN Layers Grown by MOCVD

    AlxGa1−xN {x=30% (doped and undoped), 45% (doped)} thin films were grown by MOCVD on ∼2 μm thick GaN layer using Al2O3 substrate. These films were designed to be the active parts of HFETs with nsμ product of abou...

    J. H. Mazur, M. Benamara, Z. Liliental-Weber in MRS Internet Journal of Nitride Semiconduc… (2000)

  9. No Access

    Article

    Relaxation of InGaN thin layers observed by X-ray and transmission electron microscopy studies

    Double-crystal and triple-axis x-ray diffractometry and transmission electron microscopy are used to characterize the microstructure, strain, and composition of InGaN layers grown on GaN by metalorganic chemic...

    Z. Liliental-Weber, M. Benamara, J. Washburn in Journal of Electronic Materials (2001)

  10. No Access

    Article

    Mechanisms of dislocation reduction in GaN using an intermediate temperature interlayer

    A dramatic reduction of the dislocation density in GaN was obtained by insertion of a single thin interlayer grown at an intermediate temperature (IT-IL) after the initial growth at high temperature. A descrip...

    E. D. Bourret-Courchesne, K. M. Yu, M. Benamara in Journal of Electronic Materials (2001)

  11. No Access

    Article

    Atomic Scale Analysis of InGaN Multi-Quantum Wells

    InGaN multiquantum wells grown by MOCVD on GaN have been investigated by transmission electron microscopy techniques and numerical analysis of high resolution (HREM) images. One objective of this research was ...

    M. Benamara, Z. Liliental-Weber, W. Swider, J. Washburn in MRS Online Proceedings Library (2011)

  12. No Access

    Article

    TEM Study of Mg-Doped Bulk GaN Crystals

    Transmission electron microscopy was applied to cross-sectioned samples to study surface morphology, sample polarity and defect distribution in bulk GaN samples doped with Mg. These crystals were grown from a ...

    Z. Liliental-Weber, M. Benamara, S. Ruvimov, J. H. Mazur in MRS Online Proceedings Library (2011)

  13. No Access

    Article

    Tem Study of Defects in Laterally Overgrown GaN Layers

    Transmission electron microscopy was applied to study defects in laterally overgrown GaN layers, with initial growth on A12O3 substrates followed by further growth over SiO2 masks. Dislocations found in the overg...

    Z. Liliental-Weber, M. Benamara, W. Swider, J. Washburn in MRS Online Proceedings Library (2011)

  14. No Access

    Article

    The Role of the Multi Buffer Layer Technique on the Structural Quality of GaN

    Successive growth of thick GaN layers separated by either LT-GaN or LT-AlN interlayers have been investigated by transmission electron microscopy techniques. One of the objectives of this growth method was to ...

    M. Benamara, Z. Liliental-Weber, J. H. Mazur, W. Swider in MRS Online Proceedings Library (2012)

  15. No Access

    Article

    Mg Segregation, Difficulties of P-Do** in GaN

    Transmission electron microscopy has been used to study defects formed in Mg-doped GaN crystals. Three types of crystals have been studied: bulk crystals grown by a high pressure and high temperature process w...

    Z. Liliental-Weber, M. Benamara, W. Swider, J. Washburn in MRS Online Proceedings Library (2012)

  16. No Access

    Article

    Effect of the Do** and the Al Content on the Microstructure and Morphology of Thin AlxGa1t-xN Layers Grown by MOCVD

    AlxGa1−xN {x=30% (doped and undoped), 45% (doped)} thin films were grown by MOCVD on ∼2 µm thick GaN layer using Al2O3 substrate. These films were designed to be the active parts of HFETs with nsí product of abou...

    J. H. Mazur, M. Benamara, Z. Liliental-Weber, W. Swider in MRS Online Proceedings Library (2012)

  17. No Access

    Article

    Structural and Magnetic Properties of Well-Ordered Inverted Core-Shell α-Cr2O3/ α-MxCr2-xO3 (M=Co, Ni, Mn, Fe) Nanoparticles

    Magnetic core shell nanoparticles (NPs) have potential for applications in magnetic random access memory, spintronic devices, and drug delivery systems. Our investigations are focused on the synthesis of inver...

    M. D. Hossain, S. Dey, R. A. Mayanovic, M. Benamara in MRS Advances (2016)

  18. No Access

    Article

    Formaldehyde sensing characteristics of calcium-doped zinc oxide nanoparticles-based gas sensor

    Ca-doped ZnO (CZO) nanopowders were synthesized via a simple sol–gel method. The effects of calcium on the structural, morphological, and optical properties of the resultant powders were investigated. The XRD ...

    S. Jaballah, M. Benamara, H. Dahman in Journal of Materials Science: Materials in… (2020)

  19. No Access

    Article

    High response to sub-ppm level of NO2 with 50%RH of ZnO sensor obtained by an auto-combustion method

    Pure zinc oxide was prepared by a simple auto-combustion method. The microstructure and morphological proprieties, of the prepared sample, were investigated by XRD, XPS, and SEM characterizations which indicat...

    M. Benamara, J. Massoudi, H. Dahman in Journal of Materials Science: Materials in… (2020)

  20. No Access

    Article

    Study of ZnO room temperature NO2 sensor under illumination prepared by auto-combustion

    ZnO nanoparticles have been prepared by auto-combustion method. Morphological and structural properties of the prepared samples were investigated by SEM, XRD, Raman and XPS characterizations. The XRD diffracto...

    M. Benamara, S. Soreto Teixeira, M. P. F. Graça, M. A. Valente in Applied Physics A (2021)

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