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    A sensitivity enhanced touch mode capacitive pressure sensor with double cavities

    A sensitivity enhanced touch mode capacitive pressure sensor with double cavities is proposed to improve sensitivity of pressure wave detection in this paper. The double cavities and the small gap structure re...

    Qianqian Shao, Guoxin Yang, Jianxin Jia, Liuhong Ma, Mengke Li… in Microsystem Technologies (2023)