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Article
Determining the concentration of limited gaseous noxious components in the exhaust gas of internal combustion engines by full stream measurement using titania gas sensors
The prototype of an exhaust gas sensor presented in this article is capable of performing full stream measurements within the exhaust pipe of internal combustion engines. The measurement system consists of a m...
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Chapter and Conference Paper
Interconnect Systems in Automotive Sensors at Elevated Temperatures
One limiting parameter for the application of MEMS in cars at places with elevated temperatures is the interconnect and wiring system of these devices. Currently used materials and technological concepts often...
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Article
MEMS Metallization
Silicon is the dominating material for the fabrication of MEMS devices, especially in high volume production. However, metals with their typical properties are used to enhance or enable the functionality of ME...