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Deposition of copper oxide by reactive magnetron sputtering
Copper oxide films were deposited on silicon substrates by direct current magnetron sputtering of Cu in a mixture of O2 and Ar gases. Oxidation of the target as a result of adsorption or ion-plating of the reacti...
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Article
Effects of substrate bias power on the surface of ITO electrodes during O2/CF4 plasma treatment and the resulting performance of organic light-emitting diodes
During surface treatment using O2/CF4 plasma chemistry, the bias power applied to the indium-tin-oxide(ITO) substrate significantly degrades the electrical and optical performance of the organic light emitting di...