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    Fabrication and simulation of glass micromachining using CO2 laser processing with PDMS protection

    Traditional glass micromachining using laser processing in air would produce many kinds of defects, such as bulges, debris, micro-cracks and scorches. In this article, a poly-dimethylsiloxane (PDMS) protection...

    C. K. Chung, S. L. Lin, H. Y. Wang, T. K. Tan, K. Z. Tu, H. F. Lung in Applied Physics A (2013)