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  1. No Access

    Article

    Photoresist ashing technology using N2/O2 ferrite-core ICP in the dual damascene process

    Hyoun Woo Kim, Ju Hyun Myung, Jong Woo Lee, Hyung-Sun Kim in Journal of Materials Science (2006)

  2. No Access

    Article

    Formation of nanorod-like structures through the thermal annealing of Cr films

    Hyoun Woo Kim, Ju Hyun Myung, Chongmu Lee in Journal of Materials Science (2006)

  3. No Access

    Article

    Time evolution of In2O3 rod-like structures in metalorganic chemical vapor deposition process

    Hyoun Woo Kim, Nam Ho Kim, Seung Hyun Shim, Ju Hyun Myung in Journal of Materials Science (2006)

  4. No Access

    Article

    Characteristics of Ir etching using Ar/Cl2 inductively coupled plasmas

    SE-GEUN PARK, CHIN-WOO KIM, HO-YOUNG SONG, HYOUN WOO KIM in Journal of Materials Science (2005)

  5. No Access

    Article

    MOCVD route to In2O3 thin films on SiO2 substrates

    HYOUN WOO KIM, NAM HO KIM, JU HYUN MYUNG in Journal of Materials Science (2005)

  6. No Access

    Article

    Application of N2/Ar inductively coupled plasma → the photoresist ashing for low-k dielectrics

    Hyoun Woo Kim, Ju Hyun Myung, Nam Ho Kim, Chung-Gon Yoo in Journal of Materials Science (2005)