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    Quantitative Study of Al/W Interaction In Si/SiO2/W-Ti/Al Thin Film System

    The interaction of Al and W in the Si/SiO2/W-Ti/Al thin film system is studied quantitatively by glancing angle x-ray diffraction. The formation of Al-W compounds due to annealing is monitored by the variation of...

    Hung-Yu Liu, Peng-Heng Chang, Jim Bohlman, Hun-Lian Tsai in MRS Online Proceedings Library (1988)