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Article
Substrate Heating Effect on c-Axis Texture and Piezoelectric Properties of AlN Thin Films Deposited by Unbalanced Magnetron Sputtering
Aluminum nitride (AlN) thin films with highly preferred (002) orientations have been reactively deposited by a pulsed-closed field unbalanced magnetron sputtering system using TiN/Ti as the seed/adhesion laye...
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Article
The Process Optimization of Smart Nanostructured AlN Thin Films Sputtered by Pulsed DC
A ‘Smart’ coating design, based on the incorporation of an AlN piezoelectric thin film sensor into a tribological coating system, has been explained in this paper. As part of the overall coating system, piez...
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Article
Recent advances in modulated pulsed power magnetron sputtering for surface engineering
Over the past 10 years, the development of high-power pulsed magnetron sputtering (HPPMS) has shown considerable potential in improving the quality of sputtered films by generating a high degree of ionization ...