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  1. No Access

    Article

    Substrate Heating Effect on c-Axis Texture and Piezoelectric Properties of AlN Thin Films Deposited by Unbalanced Magnetron Sputtering

    Aluminum nitride (AlN) thin films with highly preferred (002) orientations have been reactively deposited by a pulsed-closed field unbalanced magnetron sputtering system using TiN/Ti as the seed/adhesion laye...

    Masood Hasheminiasari, Jianliang Lin in JOM (2016)

  2. No Access

    Article

    The Process Optimization of Smart Nanostructured AlN Thin Films Sputtered by Pulsed DC

    A ‘Smart’ coating design, based on the incorporation of an AlN piezoelectric thin film sensor into a tribological coating system, has been explained in this paper. As part of the overall coating system, piez...

    Masood Hasheminiasari, Jianliang Lin in JOM (2015)

  3. No Access

    Article

    Recent advances in modulated pulsed power magnetron sputtering for surface engineering

    Over the past 10 years, the development of high-power pulsed magnetron sputtering (HPPMS) has shown considerable potential in improving the quality of sputtered films by generating a high degree of ionization ...

    Jianliang Lin, William D. Sproul, John J. Moore, Zhili Wu, Sabrina Lee… in JOM (2011)