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    Chapter and Conference Paper

    Ar sputter shadow method (ASSM) - a novel way to overcome the charging effect during AES bond pad analysis

    This paper discusses a novel technique using locally restricted Ar sputter for sample preparation, called ASSM, to overcome charging during AES analysis of polyimide surrounded bond pads. Subsequently, using A...

    Hui-Min Lo, Jian-Shing Luo, Jeremy D Russell in Microscopy of Semiconducting Materials (2005)