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    Fabrication of three-dimensional crystalline microstructures by selective ion implantation and chemical etching

    We present a new fabrication technique to produce three-dimensional (3D) microstructures on crystalline substrate using selective ion implantation and chemical etching. Localized lattice-damage layers at the s...

    Tzyy-Jiann Wang, Yueh-Hsun Tsou, Wen-Che Chang, Huan Niu in Applied Physics A (2011)