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    Chapter and Conference Paper

    Materials Analysis in the MODEM Project

    The paper presents a set of multimedia courses on material characterization in microelectronics. So far, XPS/ESCA and RBS have been implemented. The courses are the result of a common work between ISA and PHAS...

    F. Pêcheux, Y. Hervé, H. Marchal, N. Hertel, J. P. Stoquert… in Microelectronics Education (1998)