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    Evaluation of Vacancy-Type Defects in Simox Substrates by a Slow Positron Beam and a Pulsed Positron Beam

    Slow/monoenergetic positron beams and pulsed positron beams have been used as a non-destructive probe to investigate vacancy-type defects in SIMOX substrates which were formed by high - dose oxygen implantatio...

    H. Kametani, H. Akiyama, Y. Yamaguchi, M. Koumaru, L. Wei… in MRS Online Proceedings Library (1992)