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A study on the mechanism of amorphous phase formation by interdiffusion in Ni/Zr multilayers
The mechanism of the solid-state amorphization has been investigated by means of the microstructural studies on the evolution of Ni/Zr diffusion couples, prepared at different sputtering pressures, during shor...
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Article
Effect of Annealing on the Dielectric Properties and Microstructure of Tantalum Oxide T14in Films
Effects of heat treatments on the dielectric properties of tantalum oxide thin films(250Å) deposited on the p-Si substrates by RF reactive sputtering were investigated. The leakage current density was consider...