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Article
Characterization of non-stoichiometric co-sputtered Ba0.6Sr0.4(Ti1 − x Fe x )1 + x O3 − δ thin films for tunable passive microwave applications
The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distributi...
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Article
Effects of thermal processing and iron do** in co-sputtered barium strontium titanate thin films
The effects of the thermal processing and iron do** on RF magnetron co-sputtered barium strontium titanate thin film properties have been investigated. X-ray diffraction and Raman spectroscopy have been used...
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Article
Fabrication and characterization of iron and fluorine co-doped BST thin films for microwave applications
The effects of fluorine co-do** by means of a post-thermal annealing process of iron-doped BST thin films in a fluorine-containing atmosphere have been investigated. XPS and ToF-SIMS sputter depth profiling ...