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    High-precision nanoscale length measurement

    Modern lithographical methods used to create linear measures for nanometer-range dimensions and the main factors which limit the applications of such gages have been analyzed in the paper. Prospects for develo...

    D. V. Sheglov, S. S. Kosolobov, L. I. Fedina, E. E. Rodyakina… in Nanotechnologies in Russia (2013)