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Article

Plasma Etching Damage to Ferroelectric SrBi₂Ta₂O₉ (SBT) Thin Films and Capacitors

The effects of reactive ion etching damage on the electrical properties of Pt/SBT/Pt capacitors have been investigated. The plasma treated SBT/Pt layers showed a significant decrease in remanent polarization c...

Jun Hee Cho, Il Young Kwon, Chanro Park, Chang Ju Choi… in MRS Online Proceedings Library (1999)