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    Composition control of radio-frequency magnetron sputter-deposited La0.5Sr0.5CoO3−∂ thin films

    For this paper, we used radio-frequency (rf) sputter deposition to synthesize epitaxial La0.5Sr0.5CoO3−∂ (LSCO) films. We investigated the influence of sputter deposition parameters, in particular, oxygen partial...

    D. O. Klenov, W. Donner, L. Chen, A. J. Jacobson… in Journal of Materials Research (2003)