Skip to main content

and
  1. No Access

    Article

    Directed self-assembly of block copolymers for 7 nanometre FinFET technology and beyond

    The drive to deliver increasingly powerful and feature-rich integrated circuits has made technology node scaling—the process of reducing transistor dimensions and increasing their density in microchips—a key c...

    Chi-Chun Liu, Elliott Franke, Yann Mignot, Ruilong **e in Nature Electronics (2018)