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    Chapter and Conference Paper

    Electron Beam Nanolithography

    Lithography plays a central role in the fabrication of electronic devices, and is essential in the preparation of samples for studies of transport in 1-D. The minimum feature size required in the device is imp...

    C. D. W. Wilkinson, S. P. Beaumont in The Physics and Fabrication of Microstruct… (1986)

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    Chapter and Conference Paper

    Electron Beam Lithography and Dry Etching Techniques for the Fabrication of Quantum Wires in GaAs and AlGaAs Epilayer Systems

    Research on transport in low dimensional semiconductor systems has recently progressed from simple layered structures to patterned devices of much greater complexity. The development of fabrication techniques ...

    S. P. Beaumont, C. D. W. Wilkinson, S. Thoms… in Physics and Technology of Submicron Struct… (1988)