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    Nano-positioning Drive with Piezoelectric Actuator Integrated into Support Bearing Unit of Ball Screw

    This paper presents a new fine positioning device with a piezoelectric actuator integrated into the support-bearing unit of a ball screw. By moving the outer race of the support bearing, the piezoelectric actu...

    A. Matsubara, T. Fujita, D. Kono, N. Tanaka… in Proceedings of the 35th International MATA… (2007)