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    The Stress and Morphology Evolution of CZO Films Under Different Growth Temperature

    Zn1−xCoxO (x = 0.05, CZO) thin films are deposited on Si(111) and glass substrates at different substrate temperatures from 350 to 500 °C. All the CZO films on glass substrates exhibit compressive stress, but for...

    Dong Zhao, Yunyan Liu, Shutao Li, Rendong Wang… in Advanced Functional Materials (2018)