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    Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning

    We demonstrate a 1D beam scanning device with a maximum scan angle of 6.6° at 18.91 kHz for a 0.5 mm long PZT-on-SiN waveguide integrated Piezo-MEMS cantilever.

    P. Venkatachalam, Daniel Yumnam, Sushma Gali… in The 25th European Conference on Integrated… (2024)