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English
Chemistry
Manufacturing, Machines, Tools, Processes
Masaki Kanai
Chapter
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Chapter and Conference Paper
Evaluation of Silanol Concentration on Quartz Glass Surface for EOF Stability of CE Chip
The effects of heat treatment during fabrication process and NaOH treatment after fabrication on surface silanol (Si-OH) concentration profile are discussed. FTIR-ATR (Fourier transform Infrared Spectroscopy -...
