Skip to main content

previous disabled Page of 6
and
  1. No Access

    Article

    Numerical study of a novel electroosmotic active micromixer with twin diamond-shaped chambers and sawteeth

    Microfluidic technology is widely used in biomedicine, chemical analysis, and environmental improvement. Improvement of the mixing quality of low Reynolds number flows in micro-dimensional devices is essential...

    Liqiang Zhang, Zhuoran Zhou, Jiakang Shi, Yuanshi Wei in Microsystem Technologies (2024)

  2. No Access

    Article

    Characteristics of a microfluidic single-gate oscillator

    Microfluidic chips are considered to be one of the main controllers for future pneumatic flexible actuators. An oscillator is the most direct way to generate a pressure cycle signal, which drives an actuator t...

    Zhou Zhou, Manman Xu, Gonghan He, Daoheng Sun in Microsystem Technologies (2024)

  3. No Access

    Article

    Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio

    This paper designs and analyzes a novel RF MEMS capacitive switch with a high on/off capacitance ratio and low pull-in voltage. Compared with general capacitive RF MEMS switches, the switch adopts a new type o...

    Zhongliang Deng, Chengqi Lai, Jiali Zhou, Yucheng Wang in Microsystem Technologies (2023)

  4. No Access

    Article

    Closed‐loop control for self‐calibration of accelerometer achieved through integrated sensor and actuator system

    In-situ self-calibration can fundamentally solve the problem of long-term stability of the accelerometer. The implementation of external integrated micro structure to provide physical excitation has become an ...

    **aoshi Li, Yicheng Wang, Tianyu Yang, Yijia Du, Yu Chen in Microsystem Technologies (2021)

  5. No Access

    Article

    Design and simulation of a frequency self-tuning vibration energy harvester for rotational applications

    In order to broaden the operating frequency bandwidth of the vibration energy harvester (VEH), a novel frequency self-tuning VEH is proposed for rotating applications. Under the rotating excitation, the propos...

    Licheng Deng, Jian Jiang, Lin Zhou, Dingli Zhang, Yuming Fang in Microsystem Technologies (2021)

  6. No Access

    Article

    A low-cost, high-efficiency LED probe compatible with optical fiber port for optogenetics

    Optogenetics, combining optical techniques with genetics study and aiming at probing the neural circuits of intact mammals and other animals, has rapidly become an essential technique in neuroscience. Typicall...

    Yang Wang, Qian Zhang, ** Zhou, Bin Wang, **aoyan Wu in Microsystem Technologies (2021)

  7. No Access

    Article

    A wearable wireless device designed for surface electromyography acquisition

    A wearable surface electromyography (sEMG) acquisition system with simple structure and high performance cost ratio is designed for the portability. Both signal collection part and receiving part are included....

    **aoou Li, Zhiyong Zhou, Mengjie Ji, Wanyang Liu in Microsystem Technologies (2021)

  8. Article

    Open Access

    Validation of evaluation model and evaluation indicators comprised Kansei Engineering and eye movement with EEG: an example of medical nursing bed

    The study is to innovate an evaluation model of medical nursing bed and verify indicators by triangulation of subjective feelings, eye movement and electroencephalography (EEG). The underlying theory is Kansei...

    Zhiyong Zhou, Jianxin Cheng, Wheijane Wei, Laichung Lee in Microsystem Technologies (2021)

  9. No Access

    Article

    Transient output performance of symmetrical V-shaped micro-piezoelectric energy harvester by using PZT-5H

    Wireless sensors have been developed rapidly, while their energy supply components are relatively backward since the beginning of the twenty-first century. This paper proposes a symmetrical V-shaped micro-piez...

    Nannan Zhou, Shan Gao, Rongqi Li, Hongrui Ao, Hongyuan Jiang in Microsystem Technologies (2021)

  10. No Access

    Article

    Enhanced photocatalytic efficiency by layer-by- layer self-assembly of graphene and titanium dioxide on shrink thermoplastic film

    In this work, reduced graphene oxide/titanium dioxide (rGO/TiO2) composite material was immobilized on shrink thermoplastic film using layer-by-layer (LBL) self-assembly to remove pollutants in water, and the res...

    Peng Zhou, Tianhong Cui in Microsystem Technologies (2020)

  11. No Access

    Article

    Direct-readout pressure sensor based on AlGaN/GaN heterostructure

    Based on the excellent piezoelectricity of AlGaN/GaN heterostructures, a pressure sensor was fabricated combined with micro machining technology. Direct readout was realized by adopting Wheatstone bridge struc...

    **n Tan, Yuanjie Lv, **nye Zhou, Yuangang Wang, Xubo Song in Microsystem Technologies (2020)

  12. No Access

    Article

    A micro monolithic integrated force-torque sensor with piezoelectric tuning mechanism

    A novel micro force-torque sensor with tuning mechanism is presented in this paper. The sensor is designed and fabricated based on monolithic integrated method, including planar graphic manufacturing and lamin...

    Ran Meng, Wei** Zhang, Sui Zhou, Chenyang Wang, Jiaxin Zhao in Microsystem Technologies (2020)

  13. No Access

    Article

    Uncertainty quantification of MEMS devices with correlated random parameters

    The concern about process deviations rises because that the performance uncertainty they cause are strengthened with the miniaturization and complication of Microelectromechanical System (MEMS) devices. To pre...

    Lin-Feng Zhao, Zai-Fa Zhou, Yi-Qun Song, Mu-Zi Meng in Microsystem Technologies (2020)

  14. No Access

    Article

    Injection molding and characterization of PMMA-based microfluidic devices

    Microfluidics has been widely used in biological, chemical, medical and environmental fields for the precise control of liquid in micro/nanoscale. Various fabrication methods have been invented based on polyme...

    **uqing Ma, Rui Li, Zhiming **, Yiqiang Fan, Xuance Zhou in Microsystem Technologies (2020)

  15. No Access

    Article

    Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile

    In this paper, we demonstrate the fabrication of refractive silicon microlens array with a large focal number and almost perfect spherical lens shape. Through a modified thermal reflow, photoresist microlens a...

    **aojun Zhou, Aiguo Song, Shuai Wang, Mengjia Wang, Weixing Yu in Microsystem Technologies (2020)

  16. No Access

    Article

    Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding

    Micro–nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro–nano fluidic chips is proposed. The nano-channels are fabric...

    Lei Sun, Lingpeng Liu, Li** Qi, Ran Guo, Kehong Li, Zhifu Yin in Microsystem Technologies (2020)

  17. No Access

    Article

    Design and fabrication of a D33-mode piezoelectric micro-accelerometer

    In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin...

    Ma-hui Xu, Hui Zhou, Lin-hui Zhu, Jie-nan Shen, Yi-bo Zeng in Microsystem Technologies (2019)

  18. No Access

    Article

    A unified element stiffness matrix model for variable cross-section flexure hinges in compliant mechanisms for micro/nano positioning

    This paper presents a unified analytical model of element stiffness matrix for variable cross-section flexure hinges in plane deformation which is most frequently employed in planar-motion compliant mechanisms...

    Yanling Tian, Mingxuan Yang, Fujun Wang, Chongkai Zhou in Microsystem Technologies (2019)

  19. No Access

    Article

    3D-printed membrane microvalves and microdecoder

    A microfluidic system for multichannel switching and multiphase flow control has potential uses in pneumatic soft robotics and biological sampling systems. At present, the membrane microvalves used in microflu...

    Zhou Zhou, Gonghan He, Kunpeng Zhang, Yang Zhao, Daoheng Sun in Microsystem Technologies (2019)

  20. No Access

    Article

    Fabricating chambers of inkjet printhead by bonding SU-8 nozzle plate with suitable crosslinked degree

    The process of fabricating chambers is becoming increasingly important for inkjet printhead. However, the majority of present fabrication methods suffer from some problems, such as chamber collapsed, chamber b...

    **ng Wang, Zheng Yang, Li** Qi, Shixia Yan, Shangfei Wang in Microsystem Technologies (2019)

previous disabled Page of 6