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109 Result(s)
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Article
Numerical study of a novel electroosmotic active micromixer with twin diamond-shaped chambers and sawteeth
Microfluidic technology is widely used in biomedicine, chemical analysis, and environmental improvement. Improvement of the mixing quality of low Reynolds number flows in micro-dimensional devices is essential...
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Article
Characteristics of a microfluidic single-gate oscillator
Microfluidic chips are considered to be one of the main controllers for future pneumatic flexible actuators. An oscillator is the most direct way to generate a pressure cycle signal, which drives an actuator t...
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Article
Design and analysis of a novel low RF MEMS switch with low pull-in voltage and high capacitance ratio
This paper designs and analyzes a novel RF MEMS capacitive switch with a high on/off capacitance ratio and low pull-in voltage. Compared with general capacitive RF MEMS switches, the switch adopts a new type o...
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Article
Closed‐loop control for self‐calibration of accelerometer achieved through integrated sensor and actuator system
In-situ self-calibration can fundamentally solve the problem of long-term stability of the accelerometer. The implementation of external integrated micro structure to provide physical excitation has become an ...
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Article
Design and simulation of a frequency self-tuning vibration energy harvester for rotational applications
In order to broaden the operating frequency bandwidth of the vibration energy harvester (VEH), a novel frequency self-tuning VEH is proposed for rotating applications. Under the rotating excitation, the propos...
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Article
A low-cost, high-efficiency LED probe compatible with optical fiber port for optogenetics
Optogenetics, combining optical techniques with genetics study and aiming at probing the neural circuits of intact mammals and other animals, has rapidly become an essential technique in neuroscience. Typicall...
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A wearable wireless device designed for surface electromyography acquisition
A wearable surface electromyography (sEMG) acquisition system with simple structure and high performance cost ratio is designed for the portability. Both signal collection part and receiving part are included....
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Article
Open AccessValidation of evaluation model and evaluation indicators comprised Kansei Engineering and eye movement with EEG: an example of medical nursing bed
The study is to innovate an evaluation model of medical nursing bed and verify indicators by triangulation of subjective feelings, eye movement and electroencephalography (EEG). The underlying theory is Kansei...
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Article
Transient output performance of symmetrical V-shaped micro-piezoelectric energy harvester by using PZT-5H
Wireless sensors have been developed rapidly, while their energy supply components are relatively backward since the beginning of the twenty-first century. This paper proposes a symmetrical V-shaped micro-piez...
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Article
Enhanced photocatalytic efficiency by layer-by- layer self-assembly of graphene and titanium dioxide on shrink thermoplastic film
In this work, reduced graphene oxide/titanium dioxide (rGO/TiO2) composite material was immobilized on shrink thermoplastic film using layer-by-layer (LBL) self-assembly to remove pollutants in water, and the res...
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Article
Direct-readout pressure sensor based on AlGaN/GaN heterostructure
Based on the excellent piezoelectricity of AlGaN/GaN heterostructures, a pressure sensor was fabricated combined with micro machining technology. Direct readout was realized by adopting Wheatstone bridge struc...
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Article
A micro monolithic integrated force-torque sensor with piezoelectric tuning mechanism
A novel micro force-torque sensor with tuning mechanism is presented in this paper. The sensor is designed and fabricated based on monolithic integrated method, including planar graphic manufacturing and lamin...
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Article
Uncertainty quantification of MEMS devices with correlated random parameters
The concern about process deviations rises because that the performance uncertainty they cause are strengthened with the miniaturization and complication of Microelectromechanical System (MEMS) devices. To pre...
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Article
Injection molding and characterization of PMMA-based microfluidic devices
Microfluidics has been widely used in biological, chemical, medical and environmental fields for the precise control of liquid in micro/nanoscale. Various fabrication methods have been invented based on polyme...
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Article
Fabrication of refractive silicon microlens array with a large focal number and accurate lens profile
In this paper, we demonstrate the fabrication of refractive silicon microlens array with a large focal number and almost perfect spherical lens shape. Through a modified thermal reflow, photoresist microlens a...
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Article
Fabrication of SU-8 photoresist micro–nanofluidic chips by thermal imprinting and thermal bonding
Micro–nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro–nano fluidic chips is proposed. The nano-channels are fabric...
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Article
Design and fabrication of a D33-mode piezoelectric micro-accelerometer
In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin...
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Article
A unified element stiffness matrix model for variable cross-section flexure hinges in compliant mechanisms for micro/nano positioning
This paper presents a unified analytical model of element stiffness matrix for variable cross-section flexure hinges in plane deformation which is most frequently employed in planar-motion compliant mechanisms...
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Article
3D-printed membrane microvalves and microdecoder
A microfluidic system for multichannel switching and multiphase flow control has potential uses in pneumatic soft robotics and biological sampling systems. At present, the membrane microvalves used in microflu...
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Article
Fabricating chambers of inkjet printhead by bonding SU-8 nozzle plate with suitable crosslinked degree
The process of fabricating chambers is becoming increasingly important for inkjet printhead. However, the majority of present fabrication methods suffer from some problems, such as chamber collapsed, chamber b...