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    New layer transfers obtained by the SmartCut process

    The SmartCut process was first developed to obtain silicon-on-insulator (SOI) materials. Now an industrial process, the main Unibond SOI-structure trends are reported in this paper. Many material combinations ...

    H. Moriceau, F. Fournel, B. Aspar, B. Bataillou… in Journal of Electronic Materials (2003)