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  1. No Access

    Article

    Top Electrode Area Dependence on Displacement Property of Lead Zirconate Titanate Films Prepared by Chemical Solution Deposition Process

    Effects on ferroelectric and piezoelectric properties of top-electrode diameter variance from 80 to 8 μm were investigated using an AFM probing system connected with a ferroelectric test system with bipolar an...

    Takashi Iijima, Sachiko Ito, Hirofumi Matsuda in MRS Online Proceedings Library (2003)

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    Article

    Piezoelectric property investigation for sol-gel derived Bi4Ti3O12 thick films

    Strongly (117)-oriented Bi4Ti3O12 (BIT) thin (300 nm in thickness) and thick (900 nm in thickness) films were successfully synthesized from chemical solution and the piezoelectric and ferrelectric properties were...

    Hirofumi Matsuda, Sachiko Ito, Takashi Iijima in MRS Online Proceedings Library (2003)

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    Article

    Fabrication of Lead Zirconate Titanate Thick Film Disks for Micro Transducer Devices

    A combination of the preparation techniques for the ferroelectric films and the micro machining of Si is considered to be an effective way to fabricate microelectromechanical systems (MEMS), such as piezoelect...

    Takashi Iijima, Sachiko Ito, Hirofumi Matsuda in MRS Online Proceedings Library (2004)

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    Article

    Ferro- and piezoelectric properties of Bi4−xPrxTi3O12 polycrystalline thick films with Ps-vector orientation

    To reveal the complete performance of intrinsic ferroelectriciy-related properties in single crystalline bismuth-layer-structured displacive ferroelectrics in film form on Si, the crucial roles of both orienta...

    Hirofumi Matsuda, Sachiko Ito, Takashi Iijima in MRS Online Proceedings Library (2004)