Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Microstructure and Mechanical Properties of Nanolayered TiN/Cu Thin Films
Structural and mechanical properties of nanoscale TiN/Cu multilayers grown by dual ion beam sputtering with bilayer periods (A) ranging from 2.5 to 50 nm were studied. Both low-angle and high-angle X-ray diffr...