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Article
Synthesis of Helical Polyisocyanide with Alkyne End-Group Using Grignard Reaction
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Article
Plasma Etching Damage to Ferroelectric SrBi2Ta2O9 (SBT) Thin Films and Capacitors
The effects of reactive ion etching damage on the electrical properties of Pt/SBT/Pt capacitors have been investigated. The plasma treated SBT/Pt layers showed a significant decrease in remanent polarization c...
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Article
Dry Etching of PZT Films with CF4/Ar High Density Plasma
Lead-Zirconate-Titanate (PZT) films were etched with CF4/Ar mixed gases in high-density plasmas. Etch characteristics of the PZT film were investigated by usingin-situ plasma diagnostic tools in conjunction with ...