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Crystalline Phases and Ferroelectric Properties of Sputtered BiFeO3 Thin Films Cooled in Pure O2 and Mixed Ar/O2 Atmospheres
The fabrication of high-quality epitaxial BiFeO3 (BFO) thin films is critical for their integrated device applications. This work demonstrates a modification of two cooling atmospheres, i.e., pure O2 and mixed Ar...