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  1. No Access

    Article

    Structural and Electrical Properties of ZnO Films Deposited on GaAs Substrates by RF Magnetron Sputtering

    Sputter deposition of ZnO films on GaAs substrates has been investigated. ZnO Alms were deposited using a ZnO compound target in Ar or Ar/O2 (95/5) ambient. Deposition parameters such as RF power, substrate-targe...

    Hong Koo Kim, Michelle Mathur in MRS Online Proceedings Library (1991)

  2. No Access

    Article

    Erbium Doped Semiconductor Thin Films Prepared by Rf Magnetron Sputtering

    Highly Er-doped (~1020 atoms/cm3) silicon and silica films were deposited by RF magnetron sputtering. Erbium was doped into the host material by co-sputtering technique. Deposited films (0.5 - 1.2 µm thick) were ...

    Hong Koo Kim, Cheng Chung Li, **ao Ming Fang… in MRS Online Proceedings Library (1993)

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    Article

    Structural, Electrical, and Optical Properties of Erbium-Doped Epitaxial BaTiO3 Films Grown by RF Sputtering

    We have investigated the epitaxial growth of Er-doped BaTiO3 films using rf magnetron sputtering. The Er-doped films (0.5 - 1 μm thick) were deposited on MgO (001) single-crystal substrates at various temperature...

    Pedro Barrios, Cheng Chung Li, Hong Koo Kim… in MRS Online Proceedings Library (1995)

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    Article

    Monitoring of the Surface Species on Silicon After Chemical Cleaning by FTIR Spectroscopy

    For the analysis of as-cleaned surface, we have used a the unique IR method that uses a highsurface-area porous sample. We have observed by experiments that the oxide growth rate on silicon is reduced to a min...

    Chan-Hwa Chung, Chang-Koo Kim, Sang Heup Moon in MRS Online Proceedings Library (1995)

  5. No Access

    Article

    The critical amount of nitrogen on the formation of nitrogen gas pores during solidification of 25Cr-7Ni duplex stainless steels

    The effects of casting thickness, nitrogen contents, cooling rate, and Mn contents on the formation of nitrogen gas pores during solidification of 25Cr-7Ni-1.5Mo-3W duplex stainless steels (DSS) were quantitat...

    Young-Hwan Park PhD, Jong-Wan Kim… in Metallurgical and Materials Transactions B (2003)