SpringerLink
Log in

Fabrication of 3D Microfluidic Structures

  • Living reference work entry
  • First Online:
Encyclopedia of Microfluidics and Nanofluidics

  • 209 Accesses

Synonyms

3D microfabrication; 3D micromachining; Fabrication of 3D microfluidic channels; Microfabrication of three-dimensional microstructures; Three-dimensional patterning

Definition

The fabrication of 3D microfluidic structures is related to the microfabrication or microelectromechanical systems (MEMS) processes, which produce the microscale structures (or microchannels) involving or relating to three dimensions (x, y, and z) or aspects and giving the illusion of depth, for the handling of fluids in biomedical, chemical, biological devices, etc. It is specifically referred to in the fabrication of microstructures with complex lateral contours using a 2D mask layout. These 3D microstructures may be sculpted in a bulk substrate or created on the surface of a substrate.

Overview

3D microstructures have been highlighted in microfluidic devices and systems and typically used to improve the properties of fluidic handling, such as micro-mixers, valves, pumps, and micro total analysis...

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Institutional subscriptions

References

  1. Ghandhi SK (1994) VLSI fabrication principles (second version). Wiley, New York

    Google Scholar 

  2. Madou M (2004) Fundamentals of microfabrication. RCA Press LLC, Boca Raton

    Google Scholar 

  3. Kim MT (2004) Kinetics of etching in inductively coupled plasmas. Appl Surf Sci 228:245–256

    Article  Google Scholar 

  4. **a Y, Whitesides G (1998) Soft lithography. Annu Rev Mater Sci 28:153–184

    Article  Google Scholar 

  5. Zubel I, Kramkowska M (2005) Possibility of extension of 3-D shapes by bulk micromachining of different Si (hkl) substrates. J Micromech Microeng 15:485–493

    Article  Google Scholar 

  6. Richter K, Orfert M, Schührer H (2001) Variation of etch profile and surface properties during patterning of silicon substrates. Surf Coat Technol 142–144:797–802

    Article  Google Scholar 

  7. Shaikh K, Ryu KS, Goluch E, Nam JM, Liu J, Thaxton CS, Chiesl T, Barron A, Lu Y, Mirkin C, Liu C (2005) A modular microfluidic architecture for integrated biochemical analysis. Proc Natl Acad Sci U S A 102:9745–9750

    Article  Google Scholar 

  8. Thorsen T, Maerkl S, Quake S (2002) Microfluidic large-scale integration. Science 298:580–584

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Institute for Micromanufacturing, Louisiana Tech University, Ruston, LA, USA

    Ji Fang

  2. Department of Astronomy, University of Texas at Austin, Austin, TX, USA

    Weisong Wang

  3. Center for Microfibrous Materials Manufacturing Chemical Engineering, Auburn University, Auburn, AL, USA

    Shihuai Zhao

Authors
  1. Ji Fang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Weisong Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Shihuai Zhao
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Ji Fang .

Editor information

Editors and Affiliations

  1. VU Station B 351592, Vanderbilt University Dept. Mechanical Engineering, Nashville, Tennessee, USA

    Dongqing Li

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer Science+Business Media New York

About this entry

Cite this entry

Fang, J., Wang, W., Zhao, S. (2014). Fabrication of 3D Microfluidic Structures. In: Li, D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA. https://doi.org/10.1007/978-3-642-27758-0_520-2

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-27758-0_520-2

  • Received:

  • Accepted:

  • Published:

  • Publisher Name: Springer, Boston, MA

  • Online ISBN: 978-3-642-27758-0

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

Publish with us

Policies and ethics

Search

Navigation