Synonyms
Definition
Packaging provides electrical or mechanical access to microdevices from the outside world. Packaging also provides protection to microdevices from being damaged by the elements, such as dust, moisture, and chemicals from the environment.
Wire bonding is a technology that connects microdevices to the outside world electrically using small metal wires.
Overview
Historically, packaging technology was developed by the integrated circuit (IC) industry. When semiconductor microdevices such as transistors are fabricated on a semiconductor wafer, electrical signals can only be accessed through many micrometer-sized metal lines and contacts using specialized equipment such as a probe station, equipped with an optical microscope and micromanipulators with fine tungsten needles. In order to provide low-cost, general access to the microdevices, semiconductor wafers are first diced into small chips (or dies), and small metal...
References
Chiao M, Lin L (2004) Sealing technologies. In: Hsu TR (ed) MEMS packaging. IEE, Stevenage
Kamath SM, Tummala RR (2001) Fundamentals of single chip packaging. In: Tummala RR (ed) Fundamentals of microsystems packaging. McGraw-Hlill, Boston
Tong QY, Gosele U (1999) Semiconductor wafer bonding: sciences and technology. Wiley, New York
Cheng YT, Lin L, Najafi K (2000) Localized silicon fusion and eutectic bonding for MEMS fabrication and packaging. J Microelectromech Syst 9(1):3–8
Cheng YT, Hsu WT, Najafi K, Nguyen CTC, Lin L (2002) Vacuum packaging technology using localized aluminum/silicon-to-glass bonding. J Microelectromech Syst 11(5):556–565
Chiao M, Lin L (2006) Device-level hermetic packaging of microresonators by RTP aluminum-to-nitride bonding. J Microelectromech Syst 15(3):515–522
Puntambekar A, Ahn CH (2002) Self-aligning microfluidic interconnects for glass- and plastic-based microfluidic systems. J Micromech Microeng 12:35–40
Gonzalez C, Collins SD, Smith RL (1998) Fluidic interconnects for modular assembly of chemical microsystems. Sens Actuators B 49:40–45
Li S, Chen S (2003) Polydimethylsiloxane fluidic interconnects for microfluidic systems. IEEE Trans Adv Packag 26(3):242–247
Tsai JH, Lin LW (2001) Micro–macro fluidic interconnectors with an integrated polymer sealant. J Micromech Microeng 11:577–581
Tingrui P, Baldi A, Ziaie B (2006) A reworkable adhesive-free interconnection technology for microfluidic systems. J Microelectromech Syst 15(1):267–272
Han KH, Frazier AB (2005) Reliability aspects of packaging and integration technology for microfluidic systems. IEEE Trans Device Mater Reliab 5(3):452–457
Al-Sarawi SF, Abbott D, Franzon PD (1998) A review of 3-D packaging technology. IEEE Trans Compon Packag Manuf Technol, Part B: Adv Packag 21(1):2–14
Lin L (2000) MEMS post-packaging by localized heating and bonding. IEEE Trans Adv Packag 23(4):608–616
Stark BH, Najafi K (2004) A low-temperature thin-film electroplated metal vacuum package. J Microelectromech Syst 13(2):147–157
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media New York
About this entry
Cite this entry
Chiao, M. (2014). Packaging (and Wire Bonding). In: Li, D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA. https://doi.org/10.1007/978-3-642-27758-0_1178-3
Download citation
DOI: https://doi.org/10.1007/978-3-642-27758-0_1178-3
Received:
Accepted:
Published:
Publisher Name: Springer, Boston, MA
Online ISBN: 978-3-642-27758-0
eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering